1 Introduction
2 Geometric Features
3 Materials for Microfluidic Devices
4 Photolithography
5 Solidification Processes and Soft Lithography
6 Subtractive Processes
7 Additive Processes
8 Fugitive and Sacrificial Release Processes
9 Substrate Bonding and Fluidic Interfacing
10 Functional Domains and System Integration
1 Introduction
2 Geometric Features
3 Materials for Microfluidic Devices
4 Photolithography
5 Solidification Processes and Soft Lithography
6 Subtractive Processes
7 Additive Processes
8 Fugitive and Sacrificial Release Processes
9 Substrate Bonding and Fluidic Interfacing
10 Functional Domains and System Integration